Research
Research Overview
Our research lies at the intersection of electronic and acoustic device engineering, focusing on ultra-wide bandgap semiconductors, integrated RF systems, and quantum technologies.
Please find more interesting research images in our Gallery.
Current Focus Areas
📡 High-Frequency Acoustic Filters
- Design and fabrication of thin-film bulk acoustic resonators (FBARs) operating at K-band and above.
- Atomic layer etching (ALE) and epitaxial lift-off techniques for high-quality acoustic cavities.
🧩 Monolithic Integration of Acoustic and Electronic Devices
- Co-design and integration of FBARs with high-electron-mobility transistors (HEMTs) to create BAWFETs for compact, RF front-end modules.
- Integration of acoustic, electronic, and potential photonic components toward multifunctional and reconfigurable microsystems.
⚛️ Quantum Acoustics and Phononic Interfaces
- Cryogenic acoustic loss studies and intrinsic Q-limiting mechanisms.
- Phonon routing and mode engineering for coherent control and sensing.
If you’d like to collaborate or learn more, feel free to contact me at zhaow9@rpi.edu.