Research

Research Overview

Our research lies at the intersection of electronic and acoustic device engineering, focusing on ultra-wide bandgap semiconductors, integrated RF systems, and quantum technologies.
Please find more interesting research images in our Gallery.


Current Focus Areas

📡 High-Frequency Acoustic Filters

FBAR cross-section

  • Design and fabrication of thin-film bulk acoustic resonators (FBARs) operating at K-band and above.
  • Atomic layer etching (ALE) and epitaxial lift-off techniques for high-quality acoustic cavities.



🧩 Monolithic Integration of Acoustic and Electronic Devices

T-gate HEMT SEM

  • Co-design and integration of FBARs with high-electron-mobility transistors (HEMTs) to create BAWFETs for compact, RF front-end modules.
  • Integration of acoustic, electronic, and potential photonic components toward multifunctional and reconfigurable microsystems.



⚛️ Quantum Acoustics and Phononic Interfaces

AlN membrane release

  • Cryogenic acoustic loss studies and intrinsic Q-limiting mechanisms.
  • Phonon routing and mode engineering for coherent control and sensing.



If you’d like to collaborate or learn more, feel free to contact me at zhaow9@rpi.edu.