Gallery

Here are a few fun images from our research.


Through-SiC-Via SEM

Suspending metal-AlN-metal structure from SiC substrate

Image by Wenwen Zhao in 2022. Project sponsored in part by the SRC and DARPA through JUMP, carried out in CNF.

Through-SiC-Via SEM

Through-SiC-Via processing and soft landing

Image by Wenwen Zhao in 2022. Project sponsored in part by the SRC and DARPA through JUMP, carried out in CNF.

T-gate SEM

T-shape gate of an AlN/GaN/AlN HEMT

Image by Wenwen Zhao in 2024. Project sponsored by AFOSR, ONR and ARO, carried out in CNF.

AlN ALE SEM

AlN atomic layer etching

Image by Wenwen Zhao in 2024. Project sponsored by PlasmaTherm and CNF, carried out in CNF.

AlN membrane SEM

Epitaxial lift-off of single crystalline AlN membranes

Image by Wenwen Zhao in 2023. Project sponsored in part by the SRC and DARPA through JUMP, carried out in CNF.


Group photos